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Solberg - WL Series Vacuum Filters
Medium/High Vacuum
Solberg’s WL Series Vacuum Filters are designed for a variety of industrial and semicon processes where rapid thermal and/or pressure cycles create harsh operating conditions. Ideal for medium-high vacuum applications that utilize vacuum furnaces or deposition tools, the WL series comes standard with a variety of vacuum-rated flange options and replaceable filter elements that offer superior protection and longevity for the vacuum system. Housings in this series are 100% helium leak tested to ensure vacuum integrity and verify leak rates down to 1x 10-5 mbar/l/s.
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This product price is available on request only
Product details
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Features NW16 - NW40 Flange Connections:
- ISO flange connections
- Stainless steel ISO flange
- Buna o-ring sealed
- Seamless drawn housings
- Corrosive resistant carbon steel construction
- Powder coat finish (black models)
- O-ring housing seal
- Stainless steel torsion clips
K100 - K320 Connections:
- ISO-K stainless steel flanges standard
- Machined flange surface to RMS63, uncoated
- High quality vacuum service components
- Corrosive resistant black powder coat carbon steel
- KF10 differential ports for accurate vacuum ΔP readings
- Machined & polished sealing surfaces on ISO flange faces for reliable vacuum performance on all flange types
- K200 housings and larger have domed lid to minimize deflection and increase durability
Options NW16 - NW40 Flange Connections:
- Contact factory for larger sizes & ISO flanges
- Viton seals
- Stainless steel (select models)
- Activated alumina, activated zeolite media available for foreline trap and other applications
K100 - K320 Connections:
- Filter media options available to meet strict process requirements: PTFE, PTFE Glass, SS mesh, and more
- If required, tanks can be tested to a lower leak rate
- ISO flange connections
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Technical Specifications - Rated vacuum leak rate of 1x10-5 mbar/l/sec or better (verified by helium leak test)
- Temp (continuous): min -15°F (-26°C) max 220°F (104°C)
- Filter change out differential: 28 – 37 Torr over initial ΔP
- Polyester: 99%+ efficiency to 5 micron
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WL Series Vacuum Filter Datasheet Inlet Vacuum Filters Maintenance Manual
- Description
Features NW16 - NW40 Flange Connections:
- ISO flange connections
- Stainless steel ISO flange
- Buna o-ring sealed
- Seamless drawn housings
- Corrosive resistant carbon steel construction
- Powder coat finish (black models)
- O-ring housing seal
- Stainless steel torsion clips
K100 - K320 Connections:
- ISO-K stainless steel flanges standard
- Machined flange surface to RMS63, uncoated
- High quality vacuum service components
- Corrosive resistant black powder coat carbon steel
- KF10 differential ports for accurate vacuum ΔP readings
- Machined & polished sealing surfaces on ISO flange faces for reliable vacuum performance on all flange types
- K200 housings and larger have domed lid to minimize deflection and increase durability
Options NW16 - NW40 Flange Connections:
- Contact factory for larger sizes & ISO flanges
- Viton seals
- Stainless steel (select models)
- Activated alumina, activated zeolite media available for foreline trap and other applications
K100 - K320 Connections:
- Filter media options available to meet strict process requirements: PTFE, PTFE Glass, SS mesh, and more
- If required, tanks can be tested to a lower leak rate
- ISO flange connections
- Specifications
Technical Specifications - Rated vacuum leak rate of 1x10-5 mbar/l/sec or better (verified by helium leak test)
- Temp (continuous): min -15°F (-26°C) max 220°F (104°C)
- Filter change out differential: 28 – 37 Torr over initial ΔP
- Polyester: 99%+ efficiency to 5 micron
- Resources
WL Series Vacuum Filter Datasheet Inlet Vacuum Filters Maintenance Manual - Videos
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