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Solberg

WL Series

Medium/High Vacuum

Solberg’s WL Series Vacuum Filters are designed for a variety of industrial and semicon processes where rapid thermal and/or pressure cycles create harsh operating conditions. Ideal for medium-high vacuum applications that utilize vacuum furnaces or deposition tools, the WL series comes standard with a variety of vacuum rated flange options and replaceable filter elements that offer superior protection and longevity for the vacuum system. Housings in this series are 100% helium leak tested to ensure vacuum integrity and verify leak rates down to 1x 10-5 mbar/l/s.

 

  • This product price is available on request only

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Product details

  • Features

    NW16 - NW40 Flange Connections:

    • ISO flange connections
      • Stainless steel ISO flange
      • Buna o-ring sealed
    • Seamless drawn housings
    • Corrosive resistant carbon steel construction
    • Powder coat finish (black models)
    • O-ring housing seal
    • Stainless steel torsion clips

    K100 - K320 Connections:

    • ISO-K stainless steel flanges standard
    • Machined flange surface to RMS63, uncoated
    • High quality vacuum service components
    • Corrosive resistant black powder coat carbon steel
    • KF10 differential ports for accurate vacuum ΔP readings
    • Machined & polished sealing surfaces on ISO flange faces for reliable vacuum performance on all flange types
    • K200 housings and larger have domed lid to minimize deflection and increase durability
    Options

    NW16 - NW40 Flange Connections:

    • Contact factory for larger sizes & ISO flanges
    • Viton seals
    • Stainless steel (select models)
    • Activated alumina, activated zeolite media available for foreline trap and other applications

    K100 - K320 Connections:

    • Filter media options available to meet strict process requirements: PTFE, PTFE Glass, SS mesh, and more
    • If required, tanks can be tested to a lower leak rate
  • Technical Specifications
    • Rated vacuum leak rate of 1x10-5 mbar/l/sec or better (verified by helium leak test)
    • Temp (continuous): min -15°F (-26°C) max 220°F (104°C)
    • Filter change out differential: 28 – 37 Torr over initial ΔP
    • Polyester: 99%+ efficiency to 5 micron

     

  • WL Series Vacuum Filter Datasheet
    Inlet Vacuum Filters Maintenance Manual

     

Description
Features

NW16 - NW40 Flange Connections:

  • ISO flange connections
    • Stainless steel ISO flange
    • Buna o-ring sealed
  • Seamless drawn housings
  • Corrosive resistant carbon steel construction
  • Powder coat finish (black models)
  • O-ring housing seal
  • Stainless steel torsion clips

K100 - K320 Connections:

  • ISO-K stainless steel flanges standard
  • Machined flange surface to RMS63, uncoated
  • High quality vacuum service components
  • Corrosive resistant black powder coat carbon steel
  • KF10 differential ports for accurate vacuum ΔP readings
  • Machined & polished sealing surfaces on ISO flange faces for reliable vacuum performance on all flange types
  • K200 housings and larger have domed lid to minimize deflection and increase durability
Options

NW16 - NW40 Flange Connections:

  • Contact factory for larger sizes & ISO flanges
  • Viton seals
  • Stainless steel (select models)
  • Activated alumina, activated zeolite media available for foreline trap and other applications

K100 - K320 Connections:

  • Filter media options available to meet strict process requirements: PTFE, PTFE Glass, SS mesh, and more
  • If required, tanks can be tested to a lower leak rate
Specifications
Technical Specifications
  • Rated vacuum leak rate of 1x10-5 mbar/l/sec or better (verified by helium leak test)
  • Temp (continuous): min -15°F (-26°C) max 220°F (104°C)
  • Filter change out differential: 28 – 37 Torr over initial ΔP
  • Polyester: 99%+ efficiency to 5 micron

 

Resources
WL Series Vacuum Filter Datasheet
Inlet Vacuum Filters Maintenance Manual

 

Rent product

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Phone:
503.639.0808

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